Lithography

ASML EUV Capacity Crunch: SK Hynix and TeraFab Already Face Allocation Difficulties as imec Takes High-NA Delivery

| By The Tech Room Editorial Team
ASML EUV lithography machine in cleanroom with allocation shortage graphic showing SK Hynix and TeraFab competing for scarce High-NA EUV tools

imec, Belgium's leading semiconductor research center, has taken delivery of ASML's EXE:5200 — the most advanced High-NA EUV lithography system currently available — targeting full qualification by Q4 2026 for sub-2nm process development. The news arrives as ASML reported full-year 2025 net sales of €32.7 billion and net income of €9.6 billion. For 2026, the company guides for revenue of €34 billion to €39 billion, supported by a gross margin of 51%–53%. EUV-specific bookings surged 150% quarter-over-quarter in Q4 2025, reflecting the intensity of forward demand.

SK Hynix has committed approximately $7.9 billion for roughly 30 EUV systems by December 2027, while Samsung is acquiring approximately 20 EUV systems for its Pyeongtaek P5 fab at an estimated cost of $4 billion. A DigiTimes analysis published April 8, 2026 flags that both SK Hynix and the Elon Musk-backed TeraFab project are already facing EUV capacity allocation difficulties — meaning ASML's production output cannot satisfy current committed order volumes within customers' desired timelines.

ASML is the sole global supplier of EUV lithography tools, and the High-NA generation (EXE:5200 and EXE:5200B) is a prerequisite for sub-2nm semiconductor manufacturing. Intel has completed acceptance testing of the TWINSCAN EXE:5200B (second-generation High-NA EUV) at its own fab, making it one of only a handful of companies operating at this technology level. The allocation crunch signals that the bottleneck in advanced semiconductor manufacturing has moved upstream to the equipment layer itself — a constraint that cannot be resolved quickly, as each EUV system takes approximately 18 months to manufacture and requires more than 100,000 precision components.

Sources

TrendForce, DigiTimes, ASML

The Tech Room Editorial Team

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